CASGas nameFamilyLOD
ppbvµg.m -3
74-86-2AcetyleneOther400425.4
74-99-7PropyneOther3049.2
75-44-5PhosgeneOther330013351.2
75-73-0Carbon tetrafluorideOther180647.9
75-76-3TetramethylsilaneOther8.430.3
75-79-6MethyltrichlorosilaneOther3502139.8
107-00-61-ButyneOther1839.8
124-38-9Carbon dioxideOther0.61.1
541-02-6Siloxane D5Other8121.3
556-67-2Siloxane D4Other448.5
676-83-5DichloromethylphosphineOther190908.5
920-107-4Exxsol TM D100Other45364
920-901-0Isopar TM LOther1281
4109-96-0DichlorosilaneOther10004131.2
7637-07-2Boron trifluorideOther3901081.7
7732-18-5WaterOther16001178.9
7782-65-2GermaneOther6101912.1
7784-42-1ArsineOther11003505.7
7803-51-2PhosphineOther7.610.6
7803-62-5SilaneOther620814.5
10025-87-3Phosphorous oxychlorideOther7204515.3
10028-15-6OzoneOther7201413
13463-40-6IronpentacarbonylOther2201762.6
19287-45-7DiboraneOther8.39.4
28523-86-6SevofluraneOther100818
57041-67-5DesfluraneOther100687


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