CASGas nameFamilyRangeLOD
ppmppbvµg.m -3
74-86-2AcetyleneOther0-1200400425.4
74-99-7PropyneOther0-903049.2
75-44-5PhosgeneOther0-9900330013351.2
75-73-0Carbon tetrafluorideOther0-540180647.9
75-76-3TetramethylsilaneOther0-308.430.3
75-79-6MethyltrichlorosilaneOther0-10503502139.8
107-00-61-ButyneOther0-501839.8
124-38-9Carbon dioxideOther0-00.61.1
676-83-5DichloromethylphosphineOther0-570190908.5
4109-96-0DichlorosilaneOther0-300010004131.2
7637-07-2Boron trifluorideOther0-11703901081.7
7732-18-5WaterOther0-480016001178.9
7782-65-2GermaneOther0-18306101912.1
7784-42-1ArsineOther0-330011003505.7
7803-51-2PhosphineOther0-207.610.6
7803-62-5SilaneOther0-1860620814.5
10025-87-3Phosphorous oxychlorideOther0-21607204515.3
10028-15-6OzoneOther0-21607201413
13463-40-6IronpentacarbonylOther0-6602201762.6
19287-45-7DiboraneOther0-208.39.4


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