Other – Blue Industry and Science

CAS	Gas name	Family	LOD
			ppbv	µg.m -3
74-86-2	Acetylene	Other	400	425.4
74-99-7	Propyne	Other	30	49.2
75-44-5	Phosgene	Other	3300	13351.2
75-73-0	Carbon tetrafluoride	Other	180	647.9
75-76-3	Tetramethylsilane	Other	8.4	30.3
75-79-6	Methyltrichlorosilane	Other	350	2139.8
107-00-6	1-Butyne	Other	18	39.8
124-38-9	Carbon dioxide	Other	0.6	1.1
541-02-6	Siloxane D5	Other	8	121.3
556-67-2	Siloxane D4	Other	4	48.5
676-83-5	Dichloromethylphosphine	Other	190	908.5
920-107-4	Exxsol TM D100	Other	45	364
920-901-0	Isopar TM L	Other	12	81
4109-96-0	Dichlorosilane	Other	1000	4131.2
7637-07-2	Boron trifluoride	Other	390	1081.7
7732-18-5	Water	Other	1600	1178.9
7782-65-2	Germane	Other	610	1912.1
7784-42-1	Arsine	Other	1100	3505.7
7803-51-2	Phosphine	Other	7.6	10.6
7803-62-5	Silane	Other	620	814.5
10025-87-3	Phosphorous oxychloride	Other	720	4515.3
10028-15-6	Ozone	Other	720	1413
13463-40-6	Ironpentacarbonyl	Other	220	1762.6
19287-45-7	Diborane	Other	8.3	9.4
28523-86-6	Sevoflurane	Other	100	818
57041-67-5	Desflurane	Other	100	687